Equipment Details

Item number: 8006

Type: Lithography

Model: TwinScan XT1900Gi

Manufacturer: ASML

ASML TwinScan XT1900Gi Immersion Scanner

  • Currently still running online
  • Vintage: 2008
  • Lens data
    • SAMOS: 0.2
    • LUSL:0.6
    • RMS Spherical: 0.6
    • RMS Coma: 0.3
    • RMS Astigmatism: 0.56
    • RMS 3-foil: 0.95
    • RMS Z5-Z37: 2.01
    • NCE: 2.9
    • IPO: 8.82
    • AST: 4.29

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