Equipment Details

Item number: 8055

Type: Lithography

Model: NSR-S208D

Manufacturer: Nikon

Nikon NSR-S208D DUV Scanner

  • Currently set for 8" wafer
  • 248nm wavelength
  • Resolution <=110nm
  • NA: 0.82
  • Reduction ratio: 1:4
  • Exposure field: 26 x 33mm
  • Alignment accuracy: <=10nm
  • Throughput: >=147 wph (300mm wafer, 76 shots)

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