Equipment Details

Item number: 8106

Type: Metrology - CD SEM

Model: S-9220

Manufacturer: Hitachi

Hitachi CD SEM S-9220

  • Set for 8" wafer
  • Vintage: 2001
  • Image resolution: 3nm at 0.8kv accelerating voltage
  • Accelerating voltage rage: 0.5kv to 1.3kv
  • Magification Range: 1 kx to 300 kx
  • Measurement range: 0.1 to 2.0 
  • Reproducibility: 3nM
  • Throughput: 45 wafer/hour
  • Still running in fab

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