Equipment Details

Item number: 8127

Type: Metrology - Particle Measurement

Model: SP1-TBI

Manufacturer: KLA-Tencor

KLA Tencor SP1-TBI

  • Unpartterned Particle Measurement
  • Set for 8" wafer
  • Vintage: 2000
  • Triple beam illumination (TBI)
  • Normal illumination - 0.079 defect sensitivity
  • Oblique illumination - 0.060 defect sensitivity
  • 0.005 haze sensitivity
  • Ar Ion laser (488nm)
  • RTDC - Real Time Defect Classification
  • Measurement chamber with ULPA filter and blower unit
  • Still running in fab

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