Equipment Details

Item number: 8133

Type: Etch

Model: Alliance 9600

Manufacturer: LAM Research

LAM Research Alliance 9600PTX

  • Dry Etch Metal Al
  • Set for 8" wafer
  • Vintage: 2001
  • 2 chamber 9600DPT
  • 2 chamber MWS
  • Still running in fab

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