Equipment Details

Item number: 8136

Type: Deposition - PVD

Model: Concept Two

Manufacturer: LAM Research

LAM Research Concept Two Inova

  • Metal PVD Cu
  • Set for 8" wafer
  • Vintag: 2001
  • 2 chamber HCM Ta(N) PVD
  • 1 chamber HCM Cu PVD
  • 1 chamber Etch
  • Still running in fab

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