Applied Materials P5000 (S/N: 5988)
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- 150mm wafer size
- Process capability: 30pph
- Chamber 1: Oxide: LH DryVAC 100S, RUVAC 250, ENI 12B-1250W
- Chamber 2: Oxide: LH DryVAC 100S, RU VAC 250, ENI 12B-1250W
- Chamber 3: Oxide: LH DryVAC 100S, RUVAC 250
- Controller type: PC
- S/W Rev.: ROSS 4.8
- Process Gases: TEOS/O2?C3F8
- External cooling: Water cooled
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