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Vertical Diffusion Furnaces TEL Alpha - 81- ZAN
  • Process capability: PYRO
  • Wafer size: 200mm
  • Controller model: TS4000
  • Number of control zone: 5
  • Process gases: N2, H2, O2, DCE
  • CE mark: Yes
  • Accessories: Atmospheric system, loadsize, 100, VMU heater