Equipment Details

Item number: 8007

Type: Lithography

Model: TwinScan XT1900Gi

Manufacturer: ASML

ASML TwinScan XT1900Gi Immersion Scanner

  • Currently still running online
  • Vintage: 2009
  • Lens data
    • SAMOS: 0.29
    • LUSL:0.59
    • RMS Spherical: 0.49
    • RMS Coma: 0.54
    • RMS Astigmatism: 0.44
    • RMS 3-foil: 0.76
    • RMS Z5-Z37: 1.7
    • NCE: 8.4
    • IPO: 8
    • AST: 4.7

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