Equipment Details

Item number: 8011

Type: Lithography

Model: ACT 12

Manufacturer: TEL

TEL ACT 12 Track

  • Single Block
  • 2 Coater
  • 2 Developer
  • Set for 12" wafer
  • 4 PHP
  • 8 LHP
  • 5 CPL
  • 1 CWH
  • 1 ADH
  • 2 TRS
  • 1 TCP
  • 1 WEE

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