Equipment Details
Item number: 8108
Type: Metrology - CD SEM
Model: S-9220
Manufacturer: Hitachi
Hitachi CD SEM S-9220
- Set for 8" wafer
- Vintage: 2001
- Image resolution: 3nm at 0.8kv accelerating voltage
- Accelerating voltage rage: 0.5kv to 1.3kv
- Magification Range: 1 kx to 300 kx
- Measurement range: 0.1 to 2.0
- Reproducibility: 3nM
- Throughput: 45 wafer/hour
- Still running in fab
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